Paper Title:
Empirical Process Model for Arsenic Diffusion in Si1-x-yGexCy Alloys
  Abstract

The thermal diffusion behavior of ion-implanted Arsenic (As) in SiGeC alloy has been investigated and modeled. This paper introduces an empirical model consisting of physics-based and process-based parameters for evaluating the effective diffusivity of Arsenic in SiGeC accurately. The different process parameters that were found to affect the diffusivity were – Germanium content (x), diffusion temperature (T) and Carbon content (y). Germanium content taken into account was 7% and 12.3% for compressive strain in the structure with a Carbon content of 0.2%. The model incorporates all the effects associated with the change in the process parameters which affect the diffusivity of As in compressively strained-Si1-x-yGexCy. The model was found to be extremely accurate in predicting the exact dependencies of As diffusivity on physics-based and process parameters. The proposed empirical process model may find suitable application in the prediction of thermal diffusion behavior of As in Si1-x-yGexCy process-flow as well as in improving the existing model in Silvaco’s TCAD suite.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 26: Modeling, Analysis, and Simulation of Manufacturing Processes III
Edited by
Wu Fan
Pages
6811-6816
DOI
10.4028/www.scientific.net/AMR.383-390.6811
Citation
A. A. Sharma, S. V. Telang, A. S. Shrivastav, S. D. Shetty, S. U. Shetty, "Empirical Process Model for Arsenic Diffusion in Si1-x-yGexCy Alloys", Advanced Materials Research, Vols. 383-390, pp. 6811-6816, 2012
Online since
November 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Ivo Stloukal, Jiří Čermák
Abstract:Coefficient of 65Zn heterodiffusion in Mg17Al12 intermetallic and in eutectic alloy Mg - 33.4 wt. % Al was measured in the temperature...
189
Authors: D. Schlehuber, Egbert Wessel, Lorenz Singheiser, T. Markus
Abstract:One possibility to run a zero CO2-emission power plant is the oxyfuel combustion process. An efficient technology to separate oxygen from air...
551
Authors: Kenji Matsumoto, Yutaka Adachi, Takeshi Ohgaki, Isao Sakaguchi, Tsubasa Nakagawa, Naoki Ohashi, Hajime Haneda
Abstract:Zinc isotopic heterostructured zinc oxide thin films of 64ZnO/68ZnO/64ZnO were synthesized using pulsed laser deposition. The pulsed laser...
193
Authors: D. Prokoshkina, A.O. Rodin, V. Esin
Chapter 3: Nanomaterials and Grain Boundaries
Abstract:The temperature dependence of the bulk diffusion coefficient of Fe in Cu is determined by EDX in the temperature range from 923 to 1273 K, ,...
171
Authors: Renata Abdallah Nogueira, Carlos Roberto Grandini
Abstract:Titanium alloys are favorable implant materials for orthopedic applications, due to their desirable properties such as good corrosion...
702