Paper Title:
Research on MEMS Phthalocyanine-Based Gas Sensor
  Abstract

A gas sensor based on MEMS (microelectro-machine system) has been developed to provide a sensitive means of detecting nitrogen dioxide. The structure, configuration and fabrication steps were described. The sensor was copper phthalocyanine (CuPc) films which caused a resistance change upon exposure to nitrogen dioxide. The sensor demonstrated a good response and recovery time about 4s and 7s separately. Results also indicate to be accordance with the sensitive mechanism of CuPc in terms of semiconductor theory.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 27: Semiconductor Materials Manufacturing
Edited by
Wu Fan
Pages
6856-6860
DOI
10.4028/www.scientific.net/AMR.383-390.6856
Citation
X. Liu, "Research on MEMS Phthalocyanine-Based Gas Sensor", Advanced Materials Research, Vols. 383-390, pp. 6856-6860, 2012
Online since
November 2011
Authors
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Price
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