Paper Title:
Reliability Test and Evaluation Analysis of Silicon Pressure Sensor under Vibration Stress
  Abstract

The model silicon pressure sensor was taken as the object; in this paper, we built failure physics equation of sensor under the vibration stress based on the failure modes and failure mechanism of pressure sensor, and using vibration stress as the acceleration factor to process accelerated life testing under invariableness stress. The results show that failure physics equation of sensor yields the inverse power law relationship. The estimated value of reliability character and accelerated life equation of sensor under the vibration stress was attained through analyzing testing data and the average life and reliable life of sensor has been attained through reliability evaluation.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 27: Semiconductor Materials Manufacturing
Edited by
Wu Fan
Pages
6969-6974
DOI
10.4028/www.scientific.net/AMR.383-390.6969
Citation
L. Qin, A. L. Shi, "Reliability Test and Evaluation Analysis of Silicon Pressure Sensor under Vibration Stress", Advanced Materials Research, Vols. 383-390, pp. 6969-6974, 2012
Online since
November 2011
Authors
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Price
$32.00
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