Paper Title:
Iterative Learning Cross-Coupled Control for XY Table Based on Real-Time Contour Error Estimation
  Abstract

The contour accuracy of XY table directly driven by two linear motors was influenced by the complicated reel-time contour error model of free-form curves, uncertainty external disturbance and dynamic matching between X axis and Y axis. To establish XY table model that easily calculated and suitable for free-form curves, real-time contour error estimate method was adopted. In order to reduce uncertainty external disturbance and dynamic matching between X axis and Y axis, the iterative learning cross-coupled controller (ILCCC) was designed for current compensation on X axis and Y axis. Simulation results show that the control scheme can enhance the robustness of the system, and effectively improve the XY table of contour precision.

  Info
Periodical
Advanced Materials Research (Volumes 383-390)
Chapter
Chapter 27: Semiconductor Materials Manufacturing
Edited by
Wu Fan
Pages
7054-7059
DOI
10.4028/www.scientific.net/AMR.383-390.7054
Citation
L. M. Wang, Q. Yang, Y. B. Sun, C. F. Liu, "Iterative Learning Cross-Coupled Control for XY Table Based on Real-Time Contour Error Estimation", Advanced Materials Research, Vols. 383-390, pp. 7054-7059, 2012
Online since
November 2011
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