Titania nanotube films were produced by anodization of titanium foil. The titania nanotube films were annealed at different temperatures. Morphology evolution, phase transformation and electrical conductivity of the titania nanotubes were studied. Results showed that the nanotube walls became rough, porous and even collapsed after annealed at 400, 500 and 600 °C respectively. Titania anatase phase formed after annealed at 400 °C; the amount of anatase phase increased as the annealing temperature increased. The conductivity of the nanotube film annealed at 400 °C was improved greatly compared with the conductivity of the as-anodized nanotube film. However, the conductivity of the nanotube films annealed at higher temperatures decreased. The effect of the morphology on the electronic conductivity of the titania nanotube films was discussed.