Paper Title:

Low Cost Diffuser Based Micropump Using Pinch Actuation

Periodical Advanced Materials Research (Volume 422)
Main Theme Equipment Manufacturing Technology
Chapter Chapter 5: Micro-Electronic Packaging Technology and Equipment
Edited by Jingtao Han, Sihai Jiao and Zhengyi Jiang
Pages 397-400
DOI 10.4028/
Citation Pei Song Chee et al., 2011, Advanced Materials Research, 422, 397
Online since December 2011
Authors Pei Song Chee, Ruzairi Abdul Rahim, U. Hashim, Rashidah Arsat, Pei Ling Leow
Keywords Diffuser Based Micropump, Electromagnetic Micropump, Pinch Actuation
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Planar pinch micropump with the integration of two diffuser valve elements has been reported. The fabrication of the micropump is carried out by utilizing simple hot embossing technique for microdiffuser imprinting and spin coating for membrane construction. Parameter of diffuser design is optimized via finite element analysis (FEA). The experiment result shows that the pump works well at low frequency of 29 Hz.