Paper Title:
Low Cost Diffuser Based Micropump Using Pinch Actuation
  Abstract

Planar pinch micropump with the integration of two diffuser valve elements has been reported. The fabrication of the micropump is carried out by utilizing simple hot embossing technique for microdiffuser imprinting and spin coating for membrane construction. Parameter of diffuser design is optimized via finite element analysis (FEA). The experiment result shows that the pump works well at low frequency of 29 Hz.

  Info
Periodical
Chapter
Chapter 5: Micro-Electronic Packaging Technology and Equipment
Edited by
Jingtao Han, Sihai Jiao and Zhengyi Jiang
Pages
397-400
DOI
10.4028/www.scientific.net/AMR.422.397
Citation
P. S. Chee, R. A. Rahim, U. Hashim, R. Arsat, P. L. Leow, "Low Cost Diffuser Based Micropump Using Pinch Actuation", Advanced Materials Research, Vol. 422, pp. 397-400, Dec. 2011
Online since
December 2011
Price
US$ 28,-
Share
Authors: Zheng Han Hong, Shun Fa Hwang
Abstract:Valve-less micropumps with one or two piezoelectric buzzers are manufactured and tested. Piezoelectric buzzers are chosen as actuation...
427
Authors: Jun Hui Ni, Bei Zhi Li, Jian Guo Yang
Abstract:This paper presents a novel low-cost poly(dimethylsiloxane) (PDMS) micropump with simple planar design featuring use of compliant in-contact...
1574
Authors: Anesh K. Sharma, Ashu K. Gautam, D.V.K. Sastry, S.G. Singh
Chapter 22: Mechanical and Electronic Engineering Control
Abstract:As the requirement for the low loss phase shifter increases, so does the development of RF MEMS as a solution. This paper presents the design...
5330
Authors: Min Sun, Bo Yang, Jian Min Li, Ming Kai Lei
Chapter 3: Power Machinery and Engineering
Abstract:Experimental investigation was performed to study the influence law of the free-stream speed, angle of attack and actuation voltage on the...
726
Authors: Ya Peng Zhao, Ding Fang Chen, Quan Guo Lu
Chapter 3: Structure Analysis and Mechanical Properties of Materials
Abstract:This paper reviews the characteristics of smart materials, such as Piezoelectrics (PZT), shape memory alloys (SMA) and mganetostrictive...
260