Paper Title:
Effect of Substrate Temperature on High Rate Deposited ZnO:Al Films by Magnetron Sputtering

A series of ZnO:Al (AZO) thin films was prepared on quartz at different substrate temperature using magnetron sputtering with high deposited rate of 67 nm/min. The structural, electrical and optical properties of these films were investigated as a function of substrate deposition temperature ranging from room temperature to 500 °C. The surface micrograph of AZO film deposited at room temperature was measured by a scanning electron microscope (SEM) and an atomic force microscope (AFM). The results of X-ray diffraction (XRD) test show that all the films have a (002) preferential orientation. The best electrical property was obtained at 500 °C, the resistivity was 9.044×10-4 ohm•cm, and the corresponding carrier concentration and mobility were 3.379×1020 /cm3 and 20.45 m2/Ns, respectively. What's more, all the films show a high optical transmittance.

Advanced Materials Research (Volumes 430-432)
Chapter 1: Advanced Materials Science
Edited by
Ran Chen, Dongye Sun and Wen-Pei Sung
W. M. Li, H. Y. Hao, "Effect of Substrate Temperature on High Rate Deposited ZnO:Al Films by Magnetron Sputtering", Advanced Materials Research, Vols. 430-432, pp. 480-483, Jan. 2012
Online since
January 2012
US$ 32,-
Authors: Yue Bo Wu, Sheng Lei, Zhe Wang, Ru Hai Zhao, Lei Huang, Hui Li
Abstract:The Al-doped ZnO (AZO) films were deposited on the glass substrates by RF magnetron sputtering at different substrate temperatures. The...
Authors: Jing Jing He, Ming Zhi Wu, Yan Yan Wang, You Ming Yu, Xue Mei Wu, Lan Jian Zhuge
Abstract:ZnO:Al (AZO) films were prepared by radio frequency (RF) magnetron sputtering at various RF power (70-200W), the electrical and optical...
Authors: Yi Hua Sun, Chen Hui Li, Wei Hao Xiong, Cai Hua Huang
Thin Films
Abstract:Transparent conducting aluminum-doped zinc oxide (AZO) films have been prepared on soda-lime glass substrates by radio frequency magnetron...
Authors: Yun Hae Kim, Seung Jun An, Joon Young Kim, Kyung Man Moon, Pang Pang Wang, Dong Yan Zhang, Ri Ichi Murakami
New Functional Materials
Abstract:TCO (transparent conducting oxide) films are widely used as photoelectric devices in flat panel displays and solar cells. Until now, ITO...
Authors: Pin Chuan Yao, Shih Tse Hang, Menq Jiun Wu
Chapter 1: Materials Engineering and Processing Technologies of Materials
Abstract:Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a sintered...