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A Microvalve Driven by a Ferrofluid-Based Actuator

Journal Advanced Materials Research (Volumes 433 - 440)
Volume Materials Science and Information Technology
Edited by Cai Suo Zhang
Pages 3767-3772
DOI 10.4028/www.scientific.net/AMR.433-440.3767
Citation Tong Gang Liu et al., 2012, Advanced Materials Research, 433-440, 3767
Online since January, 2012
Authors Tong Gang Liu, Jian Wu, Cong Xia, Zi Hang Qian
Keywords Actuator, Analysis, Design, Ferrofluid, Microvalve
Abstract

A novel ferrofluid-based microvalve adopting an electromagnetic actuation is presented. In the device, ferrofluid controlled by magnetic force is used as a microactuator. The deflection of the diaphragm caused by the ferrofluid-based actuator opens or closes the fluid flow in the microchannel. A detailed description of the design and working principle of the microvalve is presented. The driving force generated by the ferrofluid under applied magnetic field has been measured by a microforce sensor. And the deflection of the diaphragm has been simulated by ANSYS software.

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