A Microvalve Driven by a Ferrofluid-Based Actuator |
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| Journal | Advanced Materials Research (Volumes 433 - 440) |
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| Volume | Materials Science and Information Technology |
| Edited by | Cai Suo Zhang |
| Pages | 3767-3772 |
| DOI | 10.4028/www.scientific.net/AMR.433-440.3767 |
| Citation | Tong Gang Liu et al., 2012, Advanced Materials Research, 433-440, 3767 |
| Online since | January, 2012 |
| Authors | Tong Gang Liu, Jian Wu, Cong Xia, Zi Hang Qian |
| Keywords | Actuator, Analysis, Design, Ferrofluid, Microvalve |
| Abstract | A novel ferrofluid-based microvalve adopting an electromagnetic actuation is presented. In the device, ferrofluid controlled by magnetic force is used as a microactuator. The deflection of the diaphragm caused by the ferrofluid-based actuator opens or closes the fluid flow in the microchannel. A detailed description of the design and working principle of the microvalve is presented. The driving force generated by the ferrofluid under applied magnetic field has been measured by a microforce sensor. And the deflection of the diaphragm has been simulated by ANSYS software. |
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