Paper Title:
Resonance Frequency Detection System of Piezoelectric Micro-Cantilever
  Abstract

A kind of resonance frequency detection of piezoelectric micro-cantilever is presented, where there is piezoelectric film deposited. The alternating current is put on the film to make it vibrate, and when resonance frequency happens, the amplitude of piezoelectric micro-cantilever reaches the maximal. A series of experiments have been done by the driving power and detecting power designed by ourselves. The experiments show that resonance frequency can be detected by the amplifier, and the amplitude of the resonance frequency is obviously bigger than the amplitude of the other frequency. The maximal amplitude is about 600nm.

  Info
Periodical
Advanced Materials Research (Volumes 443-444)
Chapter
Chapter 1: Advances in Manufacturing Engineering Techniques and Materials Science
Edited by
Li Jian
Pages
115-120
DOI
10.4028/www.scientific.net/AMR.443-444.115
Citation
C. D. Hu, M. R. Zhao, X. B. Deng, S. Zhu, "Resonance Frequency Detection System of Piezoelectric Micro-Cantilever", Advanced Materials Research, Vols. 443-444, pp. 115-120, 2012
Online since
January 2012
Export
Price
$32.00
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