Paper Title:
Study on Dynamic Characteristic of Bipolar Decoupling Micro-Machined Gyroscope
  Abstract

The micro-machined gyroscope was manufactured through CETC13 SOG process and packaged with ceramic DIP-24 at vacuum pressure. In this paper, the bipolar decoupling micro-machined models were analyzed, the drive and test mode frequency at atmospheric pressure were tested, the scale factor and the output noise were mensurated. The results showed that the high linearity micro-gyroscope had achieved high linearity and good dynamic character at atmospheric pressure.

  Info
Periodical
Advanced Materials Research (Volumes 443-444)
Chapter
Chapter 2: Optical, Electronic Materials and Industrial Application
Edited by
Li Jian
Pages
980-985
DOI
10.4028/www.scientific.net/AMR.443-444.980
Citation
J. T. Shi, S. Q. Gao, Y. L. Zheng, "Study on Dynamic Characteristic of Bipolar Decoupling Micro-Machined Gyroscope", Advanced Materials Research, Vols. 443-444, pp. 980-985, 2012
Online since
January 2012
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Price
$32.00
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