Plasma polymerization is an effective method to directly deposit ultra-thin film on substrates with advantageous properties such as good adhesion and biocompatibility. In this paper, the monomers containing amine groups with various unsaturated structures (propylamine, allylamine) are chosen to provide amine functionalities and to promote biocompatibilities for the polymerized thin films. The deposition rates revealed by measuring the thickness of thin films are characterized by profilometer under various plasma conditions. FTIR and AFM are used to study the chemical structures and morphology of the deposited thin films. In order to examine the applicability of the deposited polymers for biosensors, the activities of the incorporated biomolecules on deposited thin films are analyzed. Chinese hamster ovary (CHO) cells are cultivated on the polymerized thin films. Both propylamine and allylamine polymerized thin films show enhanced cell viability than on glass slide substrates.