Paper Title:
Precision Transfer and Replication of Ultrasonic Nanoimprint
| Periodical | Advanced Materials Research (Volumes 47 - 50) |
|---|---|
| Main Theme | Multi-functional Materials and Structures |
| Edited by | Alan K.T. Lau, J. Lu, Vijay K. Varadan, F.K. Chang, J.P. Tu and P.M. Lam |
| Pages | 411-414 |
| DOI | 10.4028/www.scientific.net/AMR.47-50.411 |
| Citation | Chiung Fang Huang et al., 2008, Advanced Materials Research, 47-50, 411 |
| Online since | June, 2008 |
| Authors | Chiung Fang Huang, Jeou Long Lee, Yung Kang Shen, Yi Lin, Chih Wei Wu |
| Keywords | Micro-Features, Optimal, Process Parameter, Replication, Ultrasonic Nanoimprint |
| Price | US$ 28,- |
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Abstract
This study succeeds to replicate a micro-feature by ultrasonic nanoimprint. The conjunction effect of the pressure and the ultrasonic vibration enables flowing of plastic into a more precise micro-feature of the metal mold. The longitudinal wave generated by an ultrasonic system of the frequency 35KMz and output power 900W. The micro-feature of the Ni mold insert used in the experiment is a groove shape. The groove’s width is 49 µm and its depth is 25 µm. The PMMA, PC and PP are chosen with the replication materials. This study also discusses the replication properties of plastic film by different processing parameters (delay pressure, fusion pressure, embossing pressure, delay time, fusion time and embossing time).
