Paper Title:
Analysis for Replication and Surface Roughness of Micro-Feature of Silicon Mold Insert by UV-LIGA Method
  Abstract

This study demonstrates the replication property and surface roughness for metal micro-mold that combines the replica molding (REM) and electroforming techniques. The micro-mold firstly uses the silicon wafer to fabricate the master mold by UV-LIGA method, and then uses the sputtering method to sputter the Ni element as the seed layer on the surface of master mold. The electroforming method manufactures the Ni mold insert from the master mold with seed layer. Finally, this study uses the PDMS material to replicate the micro-feature from the Ni mold insert by replica molding. This study indicates the replication property and surface roughness of different micro-feature shapes and sizes (concave and convex) for Ni mold insert and molded PDMS.

  Info
Periodical
Advanced Materials Research (Volumes 47-50)
Edited by
Alan K.T. Lau, J. Lu, Vijay K. Varadan, F.K. Chang, J.P. Tu and P.M. Lam
Pages
443-446
DOI
10.4028/www.scientific.net/AMR.47-50.443
Citation
C. F. Huang, J. L. Lee, Y. K. Shen, C. W. Wu, Y. Lin, S. C. Hsu, M. W. Wu, C. Y. Kao, "Analysis for Replication and Surface Roughness of Micro-Feature of Silicon Mold Insert by UV-LIGA Method", Advanced Materials Research, Vols. 47-50, pp. 443-446, 2008
Online since
June 2008
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Price
$32.00
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