Paper Title:
Enhancement of Gas Response of ZnO Micro-Nano Structured Layers through Plasma Treatment
  Abstract

Layers of ZnO micro-nano structures were deposited on quartz substrates and subsequently plasma treated in O2 and N2. It was found that exposure to O2 plasma enhanced gas response to ethanol vapor of the ZnO layers by a factor 8, while exposure to N2 plasma deteriorated the gas response. This enhancement of the gas response upon O2 plasma treatment was attributed to the formation of nanocrystallites of ZnO on the original ZnO micro-nano structures which form the gas sensing layers. The surface chemical state of the original sample was found to be not affected by the O2 plasma while it was modified by the N2 treatment.

  Info
Periodical
Advanced Materials Research (Volumes 47-50)
Edited by
Alan K.T. Lau, J. Lu, Vijay K. Varadan, F.K. Chang, J.P. Tu and P.M. Lam
Pages
634-637
DOI
10.4028/www.scientific.net/AMR.47-50.634
Citation
J.J. Delaunay, I. Nagatomo, R. Uchino, Y.B. Li, M. Shuzo, I. Yamada, "Enhancement of Gas Response of ZnO Micro-Nano Structured Layers through Plasma Treatment", Advanced Materials Research, Vols. 47-50, pp. 634-637, 2008
Online since
June 2008
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Price
$32.00
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