Influence of the Substrate Bias Voltage on the Structure of Rutile TiO₂ Films Prepared by Dual Cathode DC Unbalanced Magnetron Sputtering

Rutile TiO₂ films are normally used as biomaterial that synthesized on unheated stainless steel type 316L and glass slide substrates by dual cathode DC unbalanced magnetron sputtering. The influence of the substrate bias voltages (V_sb), from 0 V to-150V, on the structure of the as-deposited films was investigated. The crystal structure was characterized by grazing-incidence X-ray diffraction (GIXRD) technique, the films thickness and surface morphology was evaluated by atomic force microscopy (AFM) technique, respectively. The results show that the as-deposited films were transparent and have high transmittance in visible regions. The crystal structure of as-deposited films show the XRD patterns of rutile (110) with V_sb at 0V and shifted to rutile (101) with increasing V_sb. The films roughness (R_rms) and the thickness were 3.0 nm to 5.7 nm and 420 nm to 442 nm, respectively.