Paper Title:
Equal Energy Driving Principle in Fabricating Poly-Si Thin Film
| Periodical | Advanced Materials Research (Volumes 512 - 515) |
|---|---|
| Main Theme | Renewable and Sustainable Energy II |
| Edited by | Nanqi Ren, Lam Kin Che, Bo Jin, Renjie Dong and Haiquan Su |
| Pages | 55-58 |
| DOI | 10.4028/www.scientific.net/AMR.512-515.55 |
| Citation | Yu Cang Wang et al., 2012, Advanced Materials Research, 512-515, 55 |
| Online since | May, 2012 |
| Authors | Yu Cang Wang, Rui Min Jin |
| Keywords | Equal Energy Driving Principle, Poly-Si Thin Film, Rapid Thermal Annealing (RTA) |
| Price | US$ 28,- |
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Abstract
In this article, we have explained quantum state observed in fabricating poly-silicon the thin film and calculated the crystallization procession of rapid thermal annealing as a function of light energy. Equal energy driving principle was presented, it is shown that the change in magnetic frequency leads to the conversion of magnetic field energy to annealing energy.
