Design and Fabrication of Thermocapillary Micro Bubble Pump

In this paper, a novel MEMS-fabricated thermal bubble pump is proposed. By using thermocapillary effect in a microchannel loop, bubbles are designed to move only in one direction of the loop. Driving heater with a square-wave signal, bubble nucleates and grows asymmetrically above the heater. As soon as the heating pulse is turned off, an interesting phenomenon is found. Instead of bubble collapse, bubble moves toward growing direction. Continuous bubbles grow and move periodically when square-wave pulsing signals are applied. Thermocapillary pumping phenomena are achieved successfully in the experiments. By adjusting background temperature field, thermocapillary pumping phenomena can be sustained. Detailed mechanism for pumping force will be discussed in this paper.