Removing of Nano-Particles from Semiconductor Wastewater Using a Hybrid Treatment System
| Periodical | Advanced Materials Research (Volume 528) |
|---|---|
| Main Theme | Frontier of Nanoscience and Technology II |
| Edited by | Jimmy (C.M.) Kao, Meng Hou and Ran Chen |
| Pages | 71-74 |
| DOI | 10.4028/www.scientific.net/AMR.528.71 |
| Citation | B. M. Yang et al., 2012, Advanced Materials Research, 528, 71 |
| Online since | June, 2012 |
| Authors | B. M. Yang, C. M. Kao, W. P. Sung, C. P. Yang, T. Y. Chen |
| Keywords | Chemical Treatment, Membrane, Nanoparticle, Ultra-Filtration, Water Purification |
| Price | US$ 28,- |
Packaging process is one of the main manufacturing steps in the wafer fabrication industries. However, nano-particles would be produced during the packaging process. The produced nano-particle-contained wastewater has characteristics of dark color and high turbidity. Because the nano-particles would usually result in the clogging of the membrane filtration system when it is used for water treatment and reclamation, the application of a pre-treatment system is required to extend the membrane life. The objective of this study was to develop a pre-treatment system for packaging wastewater treatment before membrane system was applied for further water quality improvement. In this laboratory-scale study, a hybrid treatment system containing a chemical coagulation/flocculation followed by ultra-filtration (UF) membrane technology was developed for the wafer fabrication wastewater treatment. The chemical coagulation/flocculation unit was used as the pre-treatment process to improve the efficiency of the following ultra-filtration (UF) membrane system. The packaging wastewater was collected from a wafer fabrication factory and used to evaluate the feasibility of the coagulation/flocculation process on nano-scale particle removal. Results show that approximately 98% of turbidity could be removed at pH 7 when 2.2 mg/L of polyaluminum chloride (PAC) (used as coagulant) and 0.5 mg/L of polyacrylamide (cPAM) (used as flocculant) were added during the coagulation/flocculation process. Results indicate that the coagulation/flocculation is a feasible pre-treatment process for nano-particle removal before UF membrane is applied for further water purification. Results from this study will be helpful in designing a scale-up system for practical applications.
