Paper Title:

Microstructure and Mechanical Properties of Cr1-xAlxN Coating

Periodical Advanced Materials Research (Volume 531)
Main Theme Advanced Research on Material Engineering, Chemistry, Bioinformatics II
Edited by Helen Zhang and David Jin
Pages 3-6
DOI 10.4028/www.scientific.net/AMR.531.3
Citation C.L. Zhong et al., 2012, Advanced Materials Research, 531, 3
Online since June, 2012
Authors C.L. Zhong, L.E. Luo
Keywords Cr1-xAlxN Coatings, Hardness, Magnetron Sputtering, Microstructure
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Abstract

A series of Cr1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and the hardness of the thin films were characterized respectively with energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD) and nanoindentor. The effect of Al content on the microstructure and hardness was studied. It was found that Cr1-xAlxN compound coating exhibits a cubic structure with (1 1 1) preferred orientations and that the lattice parameter of Cr1-xAlxN coatings decrease with the increase of Al content. The hardness of Cr1-xAlxN compound coating is higher than that of CrN and increases with the increase of Al content.