Paper Title:

Research and Development of Parylene Thin-Film Deposition and Application for Water-Proofing

Periodical Advanced Materials Research (Volumes 538 - 541)
Main Theme Materials Processing Technology II
Edited by Liancheng Zhao, Haowei Wang and Changfa Xiao
Pages 23-28
DOI 10.4028/www.scientific.net/AMR.538-541.23
Citation Wen Cheng Kuo et al., 2012, Advanced Materials Research, 538-541, 23
Online since June, 2012
Authors Wen Cheng Kuo, Chao Yang Hsu
Keywords Mobile Phone, Nanometer Scale Thin-Film Deposition, Parylene, Water-Proof
Price US$ 28,-
Article Preview
View full size
Abstract

This research presents the development of parylene thin-film deposition from the micrometer scale to nanometer scale. Processes improved film uniformity by 6% in the nanometer scale to meet the requirements of new applications of parylene, such as the delamination layer of organic light-emitting diodes, the dielectric film of through-silicon-via, and water-proofing mobile phones. The application and process of water-proofing mobile phones is also examined. The tested mobile phone was coated with a 0.5 μm parylene coating and functioned properly while submerged underwater. The mobile phone is still operational; thus, nanoscale parylene deposition is a novel application for water-proofing mobile phones. The application does not concern problems associated with parts assembly or damaged rubber material.