The characteristics of morphology, friction and nanotribological properties of ZnO thin films were achieved by means of x-ray diffraction, scanning probe microscopy (SPM), and nanoindentation. The ZnO thin films were deposited by a radio frequency magnetron sputtering system. Surface geometry and friction analysis were derived from atomic force microscopy/friction force microscopy (AFM/FFM). The hardness and Young’s modulus of the ZnO thin films were investigated by nanoindentation measurements with a Berkovich indenter. The films exhibited an increase in the hardness with decreasing load i.e. the indentation size effect (ISE) was found. In addition, the nanoscratched mechanical property of the films was discussed.