Paper Title:
The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay
  Abstract

The armature fabricated with the sacrificial layer techniques is an important part of micro electromagnetic relay. So the sacrificial layer is one of the key fabrication processes in the realization of prototype of micro electromagnetic relay. In this paper several sacrificial layers including Copper, Polyimide and Positive photoresist are studied based on the investigation of the research on sacrificial layer and binding the characteristic of micro electromagnetic relay’s fabrication process.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
160-164
DOI
10.4028/www.scientific.net/AMR.60-61.160
Citation
B. D. Liu, D. S. Li, J. H. Yang, "The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay", Advanced Materials Research, Vols. 60-61, pp. 160-164, 2009
Online since
January 2009
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Price
$32.00
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