Paper Title:
Modeling of Capacitive Microaccelerometers with Squeeze Film Damping and Electrostatic Effects Using Model Order Reduction
  Abstract

Model order reduction is an effective method to generate macromodels for system-level simulation. But it is difficult to deal with the electro-mechanical-damping coupling problems. So we presents a new approach to model the capacitive microaccelerometers with squeeze film damping and electrostatic effects using model order reduction (MOR) method. In this approach, the mechanical, squeeze film damping and electrostatic domains of the devices are modeled separately and then coupled at system-level. The macromodel for squeezed film damping effects could account for slip condition of the flow at low pressure and edge effects. In addition, some important parameters are preserved as symbol. The extracted macromodels are translated into the hardware description language and imported into a circuit simulator. An accelerometer is used to demonstrate the feasibility and efficiency of the proposed approach. Numerical simulation results show that the extracted macromodel can dramatically reduce the computation cost while capturing the device behavior accurately.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
213-218
DOI
10.4028/www.scientific.net/AMR.60-61.213
Citation
Y. F. Zhang, W. Z. Yuan, H. L. Chang, J. H. Xu, "Modeling of Capacitive Microaccelerometers with Squeeze Film Damping and Electrostatic Effects Using Model Order Reduction", Advanced Materials Research, Vols. 60-61, pp. 213-218, 2009
Online since
January 2009
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$32.00
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