Paper Title:
A Bulk RF MEMS Switch by Silicon-to-GaAs Bonding
  Abstract

. A Bulk RF MEMS switch is present in this paper. The beam structure and transmission line are separated fabricated on silicon and gallium arsenide (GaAs) wafer. The beam structure, up electrode, contact and anchor are fabricated on the silicon wafer. And transmission line and down electrode are made on the GaAs substrate. Two parts of the switch are bonded together by wafer bonding using gold layer as seed. The total area of the switch is 600 um X 600 um.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
224-227
DOI
10.4028/www.scientific.net/AMR.60-61.224
Citation
L. Lu, J. Zhu, S. X. Jian, C. Chen, "A Bulk RF MEMS Switch by Silicon-to-GaAs Bonding ", Advanced Materials Research, Vols. 60-61, pp. 224-227, 2009
Online since
January 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Heng Liu, Feng Tian Zhang, Wei Su, Fu Tang Zhang
Abstract:The introduced resonant accelerometer makes use of the equivalent electrostatic stiffness to sense the acceleration. The sensitivity can be...
122
Authors: Ying Zhang, Hong Wang, Yan Wang, Sheng Ping Mao, Gui Fu Ding
Chapter 1: Material Section
Abstract:This paper presents the design, fabrication and characterization of single beam for latching electrothermal microswitch. This microswitch...
286
Authors: A. Kosyachkov, L. Wang, J. Anzellotti, R. Hallock, C. Hodgson
Chapter 6: Devices
Abstract:Abstract. Microstructural, optical and mechanical properties of oxide and fluoride films are examined. Superior optical quality, durability...
345
Authors: Fatin Syazana Jamaludin, Mohd Faizul Mohd Sabri
Abstract:The aspect ratio of microholes milled on silicon by FIB/SEM milling was investigated with various beam currents and initial depths of mill....
436
Authors: Chen Ying Wang, Shu Ming Yang, Qi Jing Lin, Zhuang De Jiang
Chapter 2: Sensors, Measurement and Detection
Abstract:The accuracy and traceability of measurement at nano-scale are directly related to nano-fabrication. Nanostep is typical structure, so the...
842