Electrical Model of Inside Sense Outside Drive Frame Micro-Gyroscope Including Quadrature Error and Coriolis Offset
| Periodical | Advanced Materials Research (Volumes 60 - 61) |
|---|---|
| Main Theme | Micro and Nano Technology |
| Edited by | Xiaohao Wang |
| Pages | 236-240 |
| DOI | 10.4028/www.scientific.net/AMR.60-61.236 |
| Citation | Bing Mo et al., 2009, Advanced Materials Research, 60-61, 236 |
| Online since | January, 2009 |
| Authors | Bing Mo, Xiao Wei Liu, Xiao Yun Tan, Wei Ping Chen, Liang Yin |
| Keywords | Coriolis Offset, Equivalent Electrical Model, Micro-Gyroscope, Quadrature Error |
| Price | US$ 28,- |
Quadrature error and Coriolis offset are main errors of micro-gyroscopes which caused by manufacturing imperfections. They deteriorate the overall performance of micro-gyroscopes. For inside sense outside drive frame micro-gyroscope, quadrature error and Coriolis offset have their own characters. Based on the mechanical analysis of inside sense outside drive frame micro-gyroscope in imperfect condition, the dynamic equations of condition with quadrature error and Coriolis offset are investigated, and an equivalent electrical model with quadrature error and Coriolis offset is presented. It is convenient to observe the effect of quadrature error and Coriolis offset by equivalent electrical model simulating. Three conditions are simulated and compared. The results indicate that the Coriolis offset reduces the amplitude of instantaneous displacement to a very small extent. Its effect can be neglected. Quadrature error causes an error displacement with the amplitude much bigger than the prefect displacement’s amplitude. It is the overwhelming error in ISOD frame micro-gyroscope.
