Paper Title:
Design and Simulation of a Z-Axis Dual Proof Mass Micromachined Gyroscope with Decoupled Oscillation Modes
  Abstract

In this paper, a Z-axis micromachined gyroscope with a new decoupled design was presented. The gyroscope consists of dual proof mass, sense frame and drive frame structure. The sense frame is constrained in the sense direction and anchored on the substrate, which minimize the influence from the motion of the proof mass in the drive direction. The drive frame is also restricted to oscillate in the drive direction. ANSYS has been used to make modal analysis and harmonic analysis to determine the vibration characteristics of the decoupled gyroscope. We introduce the decoupling ratio (ηDtS) of drive mode to sense mode and the decoupling ratio (ηStD) of sense mode to drive mode to determine the decoupling design. The results show that the drive mode and the sense mode are well decoupled.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
298-302
DOI
10.4028/www.scientific.net/AMR.60-61.298
Citation
X. Yan, Z. C. Ma, X. Y. Chen, "Design and Simulation of a Z-Axis Dual Proof Mass Micromachined Gyroscope with Decoupled Oscillation Modes ", Advanced Materials Research, Vols. 60-61, pp. 298-302, 2009
Online since
January 2009
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