Paper Title:
Fabrication of Micro Via-Hole by Wet Etching of Pyrex Glass
  Abstract

A method of fabrication of micro via-hole by wet-etching of Pyrex glass is presented in the paper. The through holes with double funnel-shape have been fabricated attribute to isotropic etching. Furthermore, the funnel-shape holes are advantageous to the joint sealing and have been applied to fabricate microfluid chips. The results show that the proportioning of corrosion solution is HF:HCl:H2O=3:6:10, and the corrosion rate is about 0.67um/min, the diameter of the holes on the both-side of the wafer is only 750 um, the middle ones are 300um

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
303-306
DOI
10.4028/www.scientific.net/AMR.60-61.303
Citation
S. X. Jia, L. Zhang, J. Zhu, "Fabrication of Micro Via-Hole by Wet Etching of Pyrex Glass", Advanced Materials Research, Vols. 60-61, pp. 303-306, 2009
Online since
January 2009
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