Fabrication of Micro Via-Hole by Wet Etching of Pyrex Glass |
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| Journal | Advanced Materials Research (Volumes 60 - 61) |
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| Volume | Micro and Nano Technology |
| Edited by | Xiaohao Wang |
| Pages | 303-306 |
| DOI | 10.4028/www.scientific.net/AMR.60-61.303 |
| Citation | Shi Xing Jia et al., 2009, Advanced Materials Research, 60-61, 303 |
| Online since | January, 2009 |
| Authors | Shi Xing Jia, Long Zhang, Jian Zhu |
| Keywords | Micro Via-Hole, Pyrex Glass, Wet Etching |
| Abstract | A method of fabrication of micro via-hole by wet-etching of Pyrex glass is presented in the paper. The through holes with double funnel-shape have been fabricated attribute to isotropic etching. Furthermore, the funnel-shape holes are advantageous to the joint sealing and have been applied to fabricate microfluid chips. The results show that the proportioning of corrosion solution is HF:HCl:H2O=3:6:10, and the corrosion rate is about 0.67um/min, the diameter of the holes on the both-side of the wafer is only 750 um, the middle ones are 300um |
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