Analysis of Temperature Effects on a Fully-Symmetrical Micromachined Gyroscope
| Periodical | Advanced Materials Research (Volumes 60 - 61) |
|---|---|
| Main Theme | Micro and Nano Technology |
| Edited by | Xiaohao Wang |
| Pages | 31-35 |
| DOI | 10.4028/www.scientific.net/AMR.60-61.31 |
| Citation | Wei Ping Chen et al., 2009, Advanced Materials Research, 60-61, 31 |
| Online since | January, 2009 |
| Authors | Wei Ping Chen, Yu Gang Guo, Xiao Liang Chen, Hong Chen, Zhen Gang Zhao |
| Keywords | MEMS Gyroscope, Quality Factor, Resonance Frequency, Temperature Effect |
| Price | US$ 28,- |
This paper researches on the temperature effects of a fully-symmetrical micromachined gyroscope. The Young’s modulus and thermal expansion coefficient of silicon vary with the environment temperature, which affects the modes’ resonant frequencies of micromachined gyroscopes. The effects of temperature fluctuation on the modes’ resonant frequencies is simulated by the FEM software ANSYS. The simulation results show that the fully-symmetrical gyroscope’s resonance frequencies decrease with the increase of temperature and the decrease degree nearly 0.256Hz/°C, but the two modes’ resonance frequencies matches well. The micromachined gyroscope’s dynamic characteristics are tested. The resonant frequencies and the quality factor are reduced with the increase of temperature and the decrease degree of the fit linear about the resonant frequencies is 0.276 Hz/°C. The test results are in good accordance with the simulation results.
