Paper Title:
Analysis of Temperature Effects on a Fully-Symmetrical Micromachined Gyroscope
  Abstract

This paper researches on the temperature effects of a fully-symmetrical micromachined gyroscope. The Young’s modulus and thermal expansion coefficient of silicon vary with the environment temperature, which affects the modes’ resonant frequencies of micromachined gyroscopes. The effects of temperature fluctuation on the modes’ resonant frequencies is simulated by the FEM software ANSYS. The simulation results show that the fully-symmetrical gyroscope’s resonance frequencies decrease with the increase of temperature and the decrease degree nearly 0.256Hz/°C, but the two modes’ resonance frequencies matches well. The micromachined gyroscope’s dynamic characteristics are tested. The resonant frequencies and the quality factor are reduced with the increase of temperature and the decrease degree of the fit linear about the resonant frequencies is 0.276 Hz/°C. The test results are in good accordance with the simulation results.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
31-35
DOI
10.4028/www.scientific.net/AMR.60-61.31
Citation
W. P. Chen, Y. G. Guo, X. L. Chen, H. Chen, Z. G. Zhao, "Analysis of Temperature Effects on a Fully-Symmetrical Micromachined Gyroscope", Advanced Materials Research, Vols. 60-61, pp. 31-35, 2009
Online since
January 2009
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Price
$32.00
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