Paper Title:
PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off
  Abstract

Microlenses are important components in optical data interconnects and MEMS-based microscopy imaging. Several microfabrication processes have been developed for the production of microlens arrays. However, assembly of microlens arrays is usually required. In this paper, we demonstrate the application of PDMS membrane patterning based on parylene C lift-off to the construction of PDMS microlens arrays on a glass substrate without an assembly step.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
343-346
DOI
10.4028/www.scientific.net/AMR.60-61.343
Citation
J. H. Tong, Y. Sun, "PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off ", Advanced Materials Research, Vols. 60-61, pp. 343-346, 2009
Online since
January 2009
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