Paper Title:
Detection for Spring Constant of Microcantilevers in Atomic Force Microscopy Based on Frequency Measurements
  Abstract

Micro cantilevers in atomic force microscopy are important force sensors in nano research, and the spring constant is one of the most important parameters of the cantilevers. Normal testing methods are not suitable for the spring constant detecting of micro cantilevers according to the strict scale of the cantilevers, and new methods are needed to the study of micro cantilevers. A method for detecting of spring constant of micro cantilevers based on combining the numerical simulation and frequency measurements is presented in this paper. The new method involves four steps, the first step is developing the vibration model of the micro cantilever studied immersed in air and determine the fluid parameters in the model during dynamic tests in atomic force microscopy presented in this paper; the second step is analyzing the vibration behavior of the corresponding cantilevers with the same geometry but different young’s modulus. The third step is measuring the natural frequencies of the micro cantilevers and comparing the experimental results with the numerical results to determine the young’s modulus of the cantilever. The last step is conducting the young’s modulus to the cantilever FEA model for determination of its spring constant. Experiments on a NSC cantilever have been done to validate the method presented in this paper.

  Info
Periodical
Advanced Materials Research (Volumes 60-61)
Edited by
Xiaohao Wang
Pages
49-52
DOI
10.4028/www.scientific.net/AMR.60-61.49
Citation
F. Wang, X. Z. Zhao, "Detection for Spring Constant of Microcantilevers in Atomic Force Microscopy Based on Frequency Measurements", Advanced Materials Research, Vols. 60-61, pp. 49-52, 2009
Online since
January 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Meng Kao Yeh, Bo Yi Chen, Nyan Hwa Tai, Chien Chao Chiu
Abstract:Atomic force microscopy (AFM) is widely used in many fields, because of its outstanding force measurement ability in nano scale. Some...
377
Authors: Yen Liang Yeh, Cheng Chi Wang, Ming Jyi Jang, Kuang Sheng Chen, Yen Pin Lin
Abstract:This study employs finite element simulations to investigate the relationship between the equivalent mass and the real mass of end masses...
773
Authors: Ali Kafash Hoshiar, Mohamad Reza Khalili, Mahmood Hashemi Nejad, Hafez Raeisi Fard
Chapter 19: Nanofabrication, Nanometrology and Applications
Abstract:In this article a model to describe relation between AFM cantilever’s deformation and force (as a force transducer) is developed. Furthermore...
3688
Authors: Shuang Mei Li, Guan Min Li, Na Wang
Chapter 14: Design for Sustainability
Abstract:This article analyzes the static and dynamic characteristics of the mcrocantilever. Methods about how to improve the frequency resolution is...
2372
Authors: Jun Yong Tao, Bin Liu, Xiao Tao Li, Yu Nan Zhang
Chapter 7: Mechatronics
Abstract:The reliability of MEMS has been a key issue for its application. Micro-cantilever is a basic structure of MEMS, which has a notable...
1725