Paper Title
Page
Authors: Min Zhuo, An Ding Chen, Jian Zhu, Long Zhang
Abstract:This paper presents deep-hole etching process by inductively coupled plasma (ICP),the hole is higher than 400um ,and its diameter is 200um...
293
Authors: Xin Yan, Zhi Chun Ma, Xu Yuan Chen
Abstract:In this paper, a Z-axis micromachined gyroscope with a new decoupled design was presented. The gyroscope consists of dual proof mass, sense...
298
Authors: Shi Xing Jia, Long Zhang, Jian Zhu
Abstract:A method of fabrication of micro via-hole by wet-etching of Pyrex glass is presented in the paper. The through holes with double funnel-shape...
303
Authors: Yi Wu Ma, Li Sheng Gao, Hui Min Chang, Zao Chun Zhang, Ying Xian Wang
Abstract:This paper discusses the nonlinear errors for a novel gap variation-type thick film capacitive micro-displacement sensor. The...
307
Authors: Chun Xiu Liu, Hong Min Liu, Qing De Yang, Nan Sen Lin, Yi Lin Song, Li Wang, Xin Xia Cai
Abstract:A biosensor based on gold electrode modified by Pt nanaoparticles/Osmium redox polymer/Nafion trilayer film was fabricated and used for...
311
Authors: W.W. Zhang, Qing An Huang, H. Yu, L.B. Lu
Abstract:Molecular dynamics simulations are carried out to characterize the mechanical properties of [001] and [110] oriented silicon nanowires, with...
315
Authors: Jhi Zhou Sun, Chao Bian, Lan Qu, Shan Hong Xia
Abstract:A new method has been developed and applied in a micro amperometric immunosensor to immobilize antibody with electropolymerized...
320
Authors: Jing Wu, Shi Xing Jia, Yun Xiang Wang, Jian Zhu
Abstract:The study is performed to implement the Gold-Gold thermocompression bonding for the wafer-level packaging of MEMS chips. Numerous...
325
Authors: Wei Chih Chen, Ting Fu Hong, Wen Bo Luo, Chang Hsien Tai, Chien Hsiung Tsai, Lung Ming Fu
Abstract:This paper presented a parametric experimental study of electrokinetic instability phenomena in a cross-shaped configuration microfluidic...
330
Authors: Hong Yu Ma, Qin Gan Huang, Ming Qin
Abstract:A design and simulation of a fully CMOS compatible micromachined multilayer cantilevers-based environmental thermometer are presented. The...
334
Showing 61 to 70 of 99 Paper Titles