Paper Title:
Laser Micromachining of Wide Bandgap Materials
  Abstract

Owing to the large photo energy, 157nm laser is considered as one of promising micro-fabrication tools. In this paper, a micromachining system based on the 157nm laser is introduced. 2D laser direct-writing and 3D micro-structuring experiments are carried out for silica glasses, fibers and diamond. For natural diamond, the ablation threshold by 157nm laser is about 2.0J/cm2. Material removal is dominantly due to photon-chemical effect for 157nm laser ablation. Effectiveness of using 157nm laser for 3D micromachining is clearly demonstrated.

  Info
Periodical
Advanced Materials Research (Volumes 69-70)
Edited by
Julong Yuan, Shiming Ji, Donghui Wen and Ming Chen
Pages
118-122
DOI
10.4028/www.scientific.net/AMR.69-70.118
Citation
Y.T. Dai, G. Xu, W. L. Li, "Laser Micromachining of Wide Bandgap Materials", Advanced Materials Research, Vols. 69-70, pp. 118-122, 2009
Online since
May 2009
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Price
$32.00
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