Ceramics are increasingly used in many advanced science and technology due to their excellent properties. Grinding is the most efficient and effective technique to achieve high dimensional accuracy and surface integrity of ground ceramic workpiece at optimum cost efficiency. The indentation/ scratch approaches are widely used in studying the grinding process. In this paper, the grinding technology and grinding induced damage of advanced ceramics are briefly reviewed. Based on MSC.Marc software, a FEM model for the Vicker’s indentation/scratch is established to simulate the abrasive grinding process, the stress and strain distribution in the advanced ceramics under a Vicker’s indenter are presented and discussed. The related elastic modulus is obtained by the nanoindentation tests.