Paper Title:
Fabrication of Micro-Structures by Micro-ECM
  Abstract

The machining of materials on microscopic scales is considered to be great importance to a wide variety of fields. Electrochemical Micro-machining (EMM) appears to be promising to machine the micro-structures in future due to the material is dissolved at the unit of ion. This paper is focused on developing a micro electrochemical machining system in which the micro-structures such as micro-cylinder, multiple micro-electrodes, micro-holes and micro-slot were processed. The micro-electrodes were prepared in a precisely controlling the electrochemical etching process. Mathematical model controlling the diameters of electrodes was built up. Furthermore, the obtained micro-electrodes were selected as the cathode tool for micro holes drilling and micro-slot milling using pulse power in Micro-ECM.

  Info
Periodical
Advanced Materials Research (Volumes 69-70)
Edited by
Julong Yuan, Shiming Ji, Donghui Wen and Ming Chen
Pages
229-233
DOI
10.4028/www.scientific.net/AMR.69-70.229
Citation
M. H. Wang, Q. F. Zhang, C.Y. Yao, W. Peng, "Fabrication of Micro-Structures by Micro-ECM", Advanced Materials Research, Vols. 69-70, pp. 229-233, 2009
Online since
May 2009
Export
Price
$32.00
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