Paper Title:
Design and Fabrication of Silicon Condenser Microphone for Industrial Use
  Abstract

A single-chip silicon condenser microphone with a sandwich diaphragm and an electroplating perforated copper backplate has been developed. The sandwich diaphragm is designed to have a slight tensile stress. The backplate is made using copper electroplating technology and perforated with circular holes. Perforated circular holes on backplate are laid out as hexagon to adjust air-gap damping between diaphragm and backplate to critical damping to enlarge frequency bandwidth of microphone. Fabrication is simple enough and only needs five photolithography marsks. Measurements show the open-circuit with 9V bias voltage reaches 5.45mv/Pa in 1KHz, pull-in voltage is 14V, and the flat frequency response within 3Db is from 100Hz to 20KHz. The performances of microphone meet the requirement of industrial use. Thereby, it has promising prospect for industrial and commercial field.

  Info
Periodical
Advanced Materials Research (Volumes 69-70)
Edited by
Julong Yuan, Shiming Ji, Donghui Wen and Ming Chen
Pages
565-569
DOI
10.4028/www.scientific.net/AMR.69-70.565
Citation
J. Dong, W. Wang, S. M. Ji, L.B. Zhang, "Design and Fabrication of Silicon Condenser Microphone for Industrial Use", Advanced Materials Research, Vols. 69-70, pp. 565-569, 2009
Online since
May 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Wei Ping Chen, Zhen Gang Zhao, Xiao Wei Liu, Yu Min Lin
Abstract:The resonance phenomenon is suppressed by adjusting the damping of the comb accelerometer structure to widen the frequency bandwidth of the...
2597
Authors: Shinsuke Hishinuma, Naoki Kimori, Yuichiro Kumai, Kouki Oku, Tetsuya Takahashi, Daiki Irokawa, Emiko Sugizaki, Naoki Watanabe, Tsuyoshi Ikehara, Ryutaro Maeda, Yasushiro Nishioka
Chapter 3: Optical and Electronic Materials
Abstract:A silicon condenser microphone on an SOI (silicon on insulator) substrate using only one photo mask was fabricated. This microphone consists...
193
Authors: Qing He, Dong Hai Qiao
Abstract:In this paper, a single-crystal silicon capacitive accelerometer is put forward. The accelerometer is composed of a single-crystal silicon...
4088
Authors: Wen Xiao Fang, Qin Wen Huang
Chapter 3: Product and Devices Design, Modelling, Simulation, Analisys and Manufacture
Abstract:This paper describes our recent work on the mechanical reliability of a commercial MEMS microphone by performing three mechanical tests, i.e....
551
Authors: Young Hwa Lee, Young Do Jung, Jun Hyuk Kwak, Shin Hur
Chapter 6: Biomedical Engineering
Abstract:A good designed MEMS microphone is very important for attaining good characteristics of sensitivity and frequency bandwidth with flat...
577