Paper Title:
Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage
  Abstract

The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning accuracy of the piezoelectric-actuated stage is limited due to the hysteretic nonlinearity of the piezo-electric actuators (PEA). To compensate this hysteresis problem, a feedforward controller based on an evolution algorithm is proposed. The dynamics of the hysteresis is formulated by the Bouc-Wen model and the evolutionary algorithms (EAs) are studied to identify the optimal parameters of the Bouc-Wen model. To verify the consistency, two micro-contouring tasks are implemented by the proposed feedforward controller with the feedback of linear optical scales in DSP based real-time control architecture.

  Info
Periodical
Edited by
Selin Teo, A. Q. Liu, H. Li and B. Tarik
Pages
235-238
DOI
10.4028/www.scientific.net/AMR.74.235
Citation
C. J. Lin, S. Y. Chen, "Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage", Advanced Materials Research, Vol. 74, pp. 235-238, 2009
Online since
June 2009
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