The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning accuracy of the piezoelectric-actuated stage is limited due to the hysteretic nonlinearity of the piezo-electric actuators (PEA). To compensate this hysteresis problem, a feedforward controller based on an evolution algorithm is proposed. The dynamics of the hysteresis is formulated by the Bouc-Wen model and the evolutionary algorithms (EAs) are studied to identify the optimal parameters of the Bouc-Wen model. To verify the consistency, two micro-contouring tasks are implemented by the proposed feedforward controller with the feedback of linear optical scales in DSP based real-time control architecture.