Paper Title:

Prediction of Burr Formation in Fabricating MEMS Components by Micro End Milling

Periodical Advanced Materials Research (Volume 74)
Main Theme NEMS/MEMS Technology and Devices - ICMAT2009
Edited by Selin Teo, A. Q. Liu, H. Li and B. Tarik
Pages 247-250
DOI 10.4028/www.scientific.net/AMR.74.247
Citation Mohammad Yeakub Ali et al., 2009, Advanced Materials Research, 74, 247
Online since June, 2009
Authors Mohammad Yeakub Ali, Mohd Aliff Omar, Khairul Irman Othman, Wayne N.P. Hung
Keywords AISI 304 Stainless Steel, Burr Formation, Burr Height, Meso-Machining, Microchannel, Micro-Electromechanical System (MEMS), Micro-Milling, Microreplication
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Abstract

This paper discusses burr formation in micromilling of AISI 304 stainless steel. Chip load, cutting speed and the application of coolant were chosen as the milling parameters. Experiments were conducted using 500 µm diameter tungsten carbide end milling tool. Milling parameters and measured burr height values were analyzed and statistical models were developed for the estimation of burr height. The models showed that the chip load and cutting speed both have direct and interactive contribution to burr formation. When micromachining without coolant, the burr height increases about 40% compared to that of machining with coolant. The optimized values of chip load and cutting speed were found to be 1 µm/tooth and 78 mms-1 respectively. The predicted burr heights were 5-7% larger than that of measured values.