Paper Title:
Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees
  Abstract

This paper presents mechanism and sources of in-phase coupling error (i.e. bias drift) in a micromachined silicon vibratory gyroscope with various vacuum degrees. Based on a detailed analysis of squeeze-film and slide-film dampings acting on each area of the mass and coupling approaches from drive mode to sense mode, the expression of coupling air damping forces were obtained. Another fact causes the drift of in-phase coupling error is, the phase of sense mode varies with the air pressure and can produce error if the demodulation phase is fix. The experiment measuring coupling error has been performed with various vacuum ranging from 7.5 mtorr to 1 atm, which indicated that in-phase coupling force is very limited and can be significantly reduced by lower the air pressure. Comparison of the theoretical and the experimental pressure-bias relation demonstrated that the change of the phase of sense mode is the dominant factor of bias drift with the change of air pressure.

  Info
Periodical
Edited by
Selin Teo, A. Q. Liu, H. Li and B. Tarik
Pages
295-298
DOI
10.4028/www.scientific.net/AMR.74.295
Citation
W. W. Zhou, Z. Y. Chen, B. Zhou, R. Zhang, "Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees", Advanced Materials Research, Vol. 74, pp. 295-298, 2009
Online since
June 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dong Xiang Jiang, Liang You Hong, Qian Huang
Abstract:In order to find the cause of the shaft crack appeared in a 600MW steam turbine generator, several measurements are taken. The shaft assembly...
591
Authors: Chao Pan, Da Gen Weng
Abstract:A new damping wall system is proposed to improve the seismic performance of high-rise coupling shear walls. The coupling beams of the...
4185
Authors: De Wan Shi, Jun Li
Chapter 27: Semiconductor Materials Manufacturing
Abstract:The expression of calculation of the waveguide-stripling-coaxial line directional coupler, Coupling is through small apertures in the form of...
6873
Authors: Xin Quan Jiao, Xiao Li Wang, Jia Bin Chen, Yong Qiu Zheng
Chapter 5: Electronics and Microelectronics, Embedded and Integrated Systems, Communications and Signal Processing, Power and Energy, Electric and Magnetic Systems
Abstract:Frequency locking of resonator gyro (R-FOG) is a key technology in gyro signal detection, the frequency locking stability determines the...
1360