Paper Title:
Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor
  Abstract

High dielectric capacitors , that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture.

  Info
Periodical
Edited by
Selin Teo, A. Q. Liu, H. Li and B. Tarik
Pages
311-314
DOI
10.4028/www.scientific.net/AMR.74.311
Citation
M. Ichiki, R. Maeda, T. Suga, "Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor ", Advanced Materials Research, Vol. 74, pp. 311-314, 2009
Online since
June 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Geun Ho Song, Wook Bahng, Nam Kyun Kim, Sang Cheol Kim, K.S. Seo, Eun Dong Kim
661
Authors: S.H. Kim, I.S. Byun, I.R. Hwang, J.S. Choi, B.H. Park, S. Seo, Man Jong Lee, D.H. Seo, E.J. Jeoung, D.-S. Suh, Y.S. Joung, I.K. Yoo
Abstract:Polycrystalline ZrO2 and yttria-stablilized ZrO2 thin films have been deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition...
1301
Authors: J.H. Choi, H.S. Yoo, K.W. Cho, N.K. Kim, S.H. Oh, E.S. Choi, S.J. Yeom, H.J. Sun, S.S. Lee, K.N. Lee, Suk Kyoung Hong, Tae Whan Hong, Il Ho Kim, Sung Lim Ryu, Soon Young Kweon
Abstract:A 16Mb 1-transistor /1-capacitor (1T1C) FeRAM device was fabricated with lead-free Bi3.25La0.75Ti3.0O12 (BLT) capacitors. The key integration...
530
Authors: Masato Noborio, Jun Suda, Tsunenobu Kimoto
Abstract:Deposited SiN/SiO2 stack gate structures have been investigated to improve the 4H-SiC MOS interface quality. Capacitance-voltage...
679
Authors: Jiang Li Cao, Kai Zhang, Axel Solbach, Zhen Xing Yue, Huang Hua Wang, Yu Chen, Uwe Klemradt
Abstract:The structural origin of imprint in Pb(Zr,Ti)O3 (PZT) ferroelectric thin films derived by chemical solution deposition with Pt top...
292