Development of Liquid Tunable Diffractive/Refractive Hybrid Lens Based on Combination of Diamond Turning and Soft Lithography |
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| Journal | Advanced Materials Research (Volume 74) |
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| Volume | NEMS/MEMS Technology and Devices - ICMAT2009 |
| Edited by | Selin Teo, A. Q. Liu, H. Li and B. Tarik |
| Pages | 85-88 |
| DOI | 10.4028/www.scientific.net/AMR.74.85 |
| Citation | Hui Min Leung et al., 2009, Advanced Materials Research, 74, 85 |
| Online since | June, 2009 |
| Authors | Hui Min Leung, Hong Bin Yu, Guang Ya Zhou, A. Senthil Kumar, Fook Siong Chau |
| Keywords | Diamond Turning, Diffractive Hybrid Lens, Fresnel Lens, High Precision Machining, Liquid Tunable Lens, Micro-Electromechanical Systems (MEMS), PDMS (Polydimethylsiloxane), Refractive Hybrid Lens, Soft Lithography |
| Abstract | A liquid tunable diffractive/refractive hybrid lens which combines the use of high precision diamond turning and soft lithography is developed in this work. This diffractive/refractive hybrid lens comprises a Fresnel lens and a tunable refractive lens automatically aligned during the fabrication process. Multiple PDMS hybrid lens devices can be fabricated from the diamond-turned master mould and AFM results show that the surface quality of the PDMS lenses meets the requirements for optical purposes. The hybrid lens is tested with a green laser (λ = 532nm) and experimental results demonstrate a tunability of more than 20mm. |
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