The Microchannel of Microfluidic Chip Fabrication by Micro-Powder Blasting |
| Journal |
Advanced Materials Research (Volumes 76 - 78) |
| Volume |
Advances in Abrasive Technology XII |
| Edited by |
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa |
| Pages |
367-372 |
| DOI |
10.4028/www.scientific.net/AMR.76-78.367 |
| Online since |
June, 2009 |
| Authors |
Chiung Fang Huang, Yung Kang Shen, Yi Lin, Chi Wei Wu |
| Keywords |
Depth, Micro Channel, Micro-Powder Blasting, Process Parameter, Surface Roughness |
| Abstract |
The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm. |
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