Paper Title:
The Microchannel of Microfluidic Chip Fabrication by Micro-Powder Blasting
  Abstract

The process of micro-powder blasting is the high speed gas flow which mixed the micro-particle and gas to impact the brittle substrate by the specialized nozzle. This paper combined various diameters Al2O3 eroding particle with a novel masking technique to fabricate the pattern channels in soda glass with a width to 2000 μm and depth down to 1631 μm. The masking technology for fabricating microchannel is consisted by the combination of two polymers: 1) the elastic and thermal-curable poly-(dimethyl siloxane) (PDMS) for its erosion resistance and 2) the brittle epoxy resin SU-8 for its photosensitivity. This paper discusses the processing procedure by the different processing parameters (micro-powder impact pressure, the distance between nozzle and substrate, micro-powder size, and micro-powder impact time) to find the optimal process. The results show that the micro-powder size is the most important factor for the depth of microchannel of microfluidic chip. The surface roughness of microchannel of microfluidic chip is nearly 5-6μm.

  Info
Periodical
Advanced Materials Research (Volumes 76-78)
Edited by
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa
Pages
367-372
DOI
10.4028/www.scientific.net/AMR.76-78.367
Citation
C. F. Huang, Y. K. Shen, Y. Lin, C. W. Wu, "The Microchannel of Microfluidic Chip Fabrication by Micro-Powder Blasting", Advanced Materials Research, Vols. 76-78, pp. 367-372, 2009
Online since
June 2009
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Price
$32.00
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