Paper Title:
Study on Micro Blasting of Glass for Micro Channel Forming
  Abstract

The production of a compact chemical reactor called a micro channel device requires a glass microfabrication technique since it involves the formation of a micro channel on the surface of a glass substrate. We propose a direct mask drawing and micro blasting technique, designed to form a micro channel on a glass substrate. This method is suitable for producing a wide variety of patterns in small quantities. In conventional micro blasting the channel formed has a narrow base i.e. “V” shape cross-sections. Using a seesaw table to tilt the glass substrate during blasting, we can produce a wider based channel i.e. “U” shape cross-sections.

  Info
Periodical
Advanced Materials Research (Volumes 76-78)
Edited by
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa
Pages
373-378
DOI
10.4028/www.scientific.net/AMR.76-78.373
Citation
S. Koshimizu, "Study on Micro Blasting of Glass for Micro Channel Forming", Advanced Materials Research, Vols. 76-78, pp. 373-378, 2009
Online since
June 2009
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Price
$32.00
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