Study on Micro Blasting of Glass for Micro Channel Forming |
| Journal |
Advanced Materials Research (Volumes 76 - 78) |
| Volume |
Advances in Abrasive Technology XII |
| Edited by |
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa |
| Pages |
373-378 |
| DOI |
10.4028/www.scientific.net/AMR.76-78.373 |
| Online since |
June, 2009 |
| Authors |
Shigeomi Koshimizu |
| Keywords |
Direct Mask Drawing, Glass Substrate, Inclined Blasting, Micro Blasting, Micro Channel, Shape of Groove |
| Abstract |
The production of a compact chemical reactor called a micro channel device requires a glass microfabrication technique since it involves the formation of a micro channel on the surface of a glass substrate. We propose a direct mask drawing and micro blasting technique, designed to form a micro channel on a glass substrate. This method is suitable for producing a wide variety of patterns in small quantities. In conventional micro blasting the channel formed has a narrow base i.e. “V” shape cross-sections. Using a seesaw table to tilt the glass substrate during blasting, we can produce a wider based channel i.e. “U” shape cross-sections. |
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