Paper Title:
Blasting of Affected Layer of Silicon Surface Sliced by Wire EDM
  Abstract

Polycrystalline ingot slicing by wire electric discharge machining (W-EDM) has been investigated to reduce kerf loss and wafer thickness. In order to use the sliced wafers for semiconductor devices, the modified surface layer induced by W-EDM must be removed. In this paper, we have demonstrated the elimination of the layer by abrasive blasting. Three types of abrasives were blasted at a speed of 100 m/s. The surfaces blasted with WA #1000 and GC #1000 were smoother than that sliced with a wire saw. The modified layer induced by W-EDM slicing could be removed by blasting with WA #1000 while scanning the surface three times. Solar cells were fabricated using wafers with the blasted surface with an efficiency of 15.2%, which was almost the same as that of cells fabricated from the wire-sliced wafers.

  Info
Periodical
Advanced Materials Research (Volumes 76-78)
Edited by
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa
Pages
440-444
DOI
10.4028/www.scientific.net/AMR.76-78.440
Citation
H. Hidai, T. Sugita, H. Tokura, "Blasting of Affected Layer of Silicon Surface Sliced by Wire EDM", Advanced Materials Research, Vols. 76-78, pp. 440-444, 2009
Online since
June 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Woo Sik Yoo, Quan Qia Jin, Dong Sam Park, Eun Je Seong, Jin Yong Han
Abstract:Powder blasting is similar to sand blasting and effectively removes hard and brittle materials. With an increase in the need for machining...
897
Authors: Cong Rong Zhu, Bing Hai Lv, Ju Long Yuan
Abstract:Studies on chemical mechanical polishing (CMP) for silicon nitride (Si3N4) balls with CeO2 abrasive carried to investigate the mechanism of...
131
Authors: Yong Bo Wu, Kunio Shimada
Abstract:This paper deals with the machining of quartz wafers using an MCF (Magnetic Compound Fluid) polishing liquid, frozen with liquid nitrogen....
187
Authors: Zeng Dian Zhao, Yu Hong Huang, Yu Gang Zhao, Xian Jin Yu
Abstract:The silicon-coated iron powder was evenly mixed with corundum powder and high temperature binder. After tabletting and sintering, followed by...
553
Authors: Hai Long Wu, Yun Huang, Zhi Huang, G.J. Cheng
Abstract:Blades are the key parts of the turbine, which usually use materials such as 1Cr13 stainless steel. These materials are of high strength,...
452