Fabrication of Aspheric Micro Lens Array by Slow Tool Servo |
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| Journal | Advanced Materials Research (Volumes 76 - 78) |
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| Volume | Advances in Abrasive Technology XII |
| Edited by | Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa |
| Pages | 479-484 |
| DOI | 10.4028/www.scientific.net/AMR.76-78.479 |
| Citation | Chun Chieh Chen et al., 2009, Advanced Materials Research, 76-78, 479 |
| Online since | June, 2009 |
| Authors | Chun Chieh Chen, Choung Lii Chao, Wei Yao Hsu, Fong Chi Chen, Chung Woei Chao |
| Keywords | Aspheric Lens Array, Diamond Turning, Slow Tool Servo |
| Abstract | Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses. |
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