Fabrication of Carbon Nanotube Probes in Atomic Force Microscopy |
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| Journal | Advanced Materials Research (Volumes 76 - 78) |
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| Volume | Advances in Abrasive Technology XII |
| Edited by | Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa |
| Pages | 497-501 |
| DOI | 10.4028/www.scientific.net/AMR.76-78.497 |
| Citation | Zong Wei Xu et al., 2009, Advanced Materials Research, 76-78, 497 |
| Online since | June, 2009 |
| Authors | Zong Wei Xu, Feng Zhou Fang, Xiao Tang Hu |
| Keywords | Atomic Force Microscope (AFM), Focused Ion Beam (FIB), Metrology, Nanotube |
| Abstract | Carbon nanotube (CNT) probe used in atomic force microscopy (AFM) was fabricated by using electron beam induced Pt deposition method. The bonding force for CNT probe was found to be larger than 500nN. The nanotube probe’s length was shortened by focused ion beam milling process. It is confirmed that the CNT probe shows higher aspect ratio than the Si probe. The nanotube probes with fullerene-like cap end present higher imaging resolution than those with open end. |
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