Study on Replication of Micro Channel Structures onto Polytetrafluoroethylene (PTFE) Substrate Employing Two-Stage Hot Embossing
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| Journal |
Advanced Materials Research (Volumes 76 - 78) |
| Volume |
Advances in Abrasive Technology XII |
| Edited by |
Han Huang, Liangchi Zhang, Jun Wang, Zhengyi Jiang, Libo Zhou, Xipeng Xu and Tsunemoto Kuriyagawa |
| Pages |
526-531 |
| DOI |
10.4028/www.scientific.net/AMR.76-78.526 |
| Online since |
June, 2009 |
| Authors |
Shin-Ichiro Hira, Zhu Qing Wang, Masato Yoshioka, Yu Zhang, Yutaka Nobukawa |
| Keywords |
Assessment of Replication Accuracy, Polytetrafluoroethylene (PTFE), Replication of Micro Channel Structures, Two-Stage Hot Embossing |
| Abstract |
Replication of micro structures on a polymer substrate employing two-stage hot embossing is described in this paper. Linear channels with rectangular cross section were fabricated on a master mold of a brass plate by means of a computer numerical control (CNC) machining center using a micro end mill. In the first embossing process, the master mold with concavity features was embossed on a polycarbonate (PC) plate in order to make a “polymer replication mold”. Polytetrafluoroethylene (PTFE) was chosen as a material of polymer substrate used in the second embossing process. The replicated structure on PTFE substrate was observed and each dimension of its cross-sectional shape was also measured in order to assess the replication accuracy. According to the results, it was found that the depth of a replicated channel was near 90 % of that on the master mold. But roundness at each corner could be also found due to the insufficiency of plastic flow. Furthermore the deformation of the structures on a replication mold of PC before and after 2nd hot embossing process was also examined. As a result, it was found that the deformation ratio at temperatures below 145 oC was roughly smaller than 10 %. |
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