The present work is aimed at optimizing the parameters of micro Wire Electric Discharge Machining (µ-WEDM) process by considering the simultaneous effects of input parameters viz: gap voltage, capacitance and feed rate. Experiments were planned and conducted using DoE techniques. ANOVA was performed to find out the significance of each factor. Regression models were developed for the experimental results of surface roughness and overcut of the micro slots produced on aluminium. Then Genetic Algorithm (GA) was employed to determine the values of optimal process parameters for the desired output value of micro wire electric discharge machining characteristics.