Paper Title:
Modeling and Optimization of Nanomechanics of Diamond-Like Carbon by MPCVD Using Response Surface Methodology
  Abstract

Diamond-like carbon (DLC) films have attracted great interest due to their outstanding mechanical, biocompatibility, thermal, optical and electrical properties. The DLC films can be produced by microwave plasma chemical vapor deposition (MPCVD) using Argon, methane and hydrogen mixed gases. The film properties depend strongly on the experimental parameters such as substrate temperatures; microwave power, process pressure and hydrogen concentration (H2/Ar+CH4+H2). In this study, the properties of nanomechanics of DLC films with various experimental parameters are firstly discussed which include hardness and Young’s modulus characterizing by depth-sensing nanoindentation technique. The nanoindentation is an excellent method for measuring nanomechanical properties of both bulk and thin films. The probe was conducted using a Berkovich diamond tip. To find the optimized process parameters, the statistical and mathematical response surface methodology (RSM) is used to model and analyze the effect of substrate temperature (T), microwave power (W), process pressure (P) and hydrogen concentration (H) on the properties of nanomechanics of DLC films. The central composite experimental design (CCD) is used to evaluate the interaction parametric effects of multiple experimental variables on process response (hardness and Young’s modulus). The predictive quadratic model proposed herein considering the analysis of variance (ANOVA) are proved to fit and predict values of the hardness and Young’s modulus close to those readings recorded experimentally. The most significant influential factors for maximizing the hardness and Young’s modulus have been identified from the ANOVA table. The RSM technique is demonstrated to be a powerful tool in exploration of the manufacturing parameters space of complex physical process of DLC films deposition by MPCVD.

  Info
Periodical
Advanced Materials Research (Volumes 79-82)
Edited by
Yansheng Yin and Xin Wang
Pages
1321-1324
DOI
10.4028/www.scientific.net/AMR.79-82.1321
Citation
J. S. Chen, K. E. Ting, H. C. Wang, "Modeling and Optimization of Nanomechanics of Diamond-Like Carbon by MPCVD Using Response Surface Methodology", Advanced Materials Research, Vols. 79-82, pp. 1321-1324, 2009
Online since
August 2009
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$32.00
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