Paper Title:
Preparation of Uniform SiO2 Films on Sapphire Dome by r.f. Magnetron Reactive Sputtering
| Periodical | Advanced Materials Research (Volumes 79 - 82) |
|---|---|
| Main Theme | Multi-Functional Materials and Structures II |
| Edited by | Yansheng Yin and Xin Wang |
| Pages | 679-682 |
| DOI | 10.4028/www.scientific.net/AMR.79-82.679 |
| Citation | Li Ping Feng et al., 2009, Advanced Materials Research, 79-82, 679 |
| Online since | August, 2009 |
| Authors | Li Ping Feng, Zheng Tang Liu, Qi Jun Liu, Yang Ping Li |
| Keywords | Dome, Magnetron Reactive Sputtering, Sapphire, SiO2 Film |
| Price | US$ 28,- |
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Abstract
The convex surface of the infrared dome is exposed to the harsh environment of the outside world, and therefore requires a coating which not only increases transmission but is able to withstand rain erosion so as to enhance system performance. This paper deals with the techniques that were developed to deposit a uniform thick SiO2 coating for sapphire dome by radio frequency magnetron sputtering. Results show that average transmission increment in wavelength range from 3 to 5um for the sapphire dome coated on convex surface was more than 4.0%. The transmission non-uniformity over the convex surface of the coated sapphire dome was less than 1.7%.
