Ba0.7Sr0.3TiO3 (BST) thin films have been prepared on copper foils via sol-gel method in almost inert atmosphere containing different level of oxygen which was achieved by flowing high purified argon with the varied rate from 0.3 L/min to 2.0 L/min. X-ray diffraction pattern of the BST thin film exhibits dominant perovskite phase. SEM images reveal good crystallization and much dense structure of the thin film. The BST thin film annealed at almost inert atmosphere by flowing the high purified argon at the rate of 0.5 L/min, exhibits highest dielectric constants which are 1549.65 and 1350.86 at the frequency of 10 kHz and 1 MHz, respectively. Additionally, the film also shows optimized ferroelectric behavior and low leakage current density. The mechanism of the annealing atmosphere on properties of BST thin films was investigated.